Hauv thaj teb ntawm cov cuab yeej tsim khoom, polysilicon Gate Rings yog qhov tseem ceeb ntawm cov ntxaij tsim khoom. Thaum txhawb lub zos ntawm cov chaw ua haujlwm tseem ceeb, ib qho kev sib tsoo hauv polysilicon nrog lub cheeb tsam nyuaj - nws yog ib qho nyuaj los ntsib cov kev xav tau ntau heev.
Ua cov ntsiab lus ntawm kev lag luam
A. Ua cov keeb kwm yav dhau los
Vim nws cov khoom zoo tshaj plaws, polysilicon tau siv dav hauv rooj vag cov txheej txheem xws li ion cog kob thiab lwm yam. Xws li cov khoom yuav tsum tau tshem tawm ntau tshaj 7 {{0% ntawm cov kev sib tsoo yog tsawg dua los yog sib npaug ntawm cov khoom siv sib luag thiab lub neej ntawm lub cuab tam.
B. Kev teeb meem ntawm kev ua yeeb yam
1. Tso cai sib tsoo sib tsoo muaj kev ua haujlwm tsis txaus, thiab ib daim siv ntau tshaj 8 teev
2. Tus nqi Chipping thaum lub sijhawm ua cov txheej txheem yog li 35%, ua rau muaj kev khij hauv pob
3. Lub voj voog sab hauv sib txawv sib txawv?> {0. 015mm, uas cuam tshuam rau cov kev sib txuam ntawm cov khoom siv ntshav ntshav ntshav
Bishen cov kev daws teeb meem: Ultrasonic tshuab + Kev nrawm nrawm tig sib koom tes ua haujlwm
Hauv kev pom ntawm kev ua cov yam ntxwv ntawm polysilicon nyuaj thiab cov ntaub ntawv loj, pawg bishen txuj ci chaws customized w peb-hauv-ib qho kev daws teeb meem:
1. Ultrasonic precision engraving thiab milling system: 20khz high-furn-furn-furn-fullration recreces rho tawm txiav tsis kam los ntawm 50%
2. DDR ntsug high-ceev spinTable: 3000rpm ± 1 "precision, ua tiav nano-theem kev tswj hwm
3. Gradient Composite Tool:
Pob zeb diamond-coated cov cuab yeej siv rau cov khoom siv ceev tshem tawm thaum ua cov khoom siv ntxhib
Ultrasonic PCD cov cuab yeej raug hloov pauv rau kev ua kom zoo
Cov ntaub ntawv ntsuas rov ua haujlwm ntawm kev lag luam bufmark
Nyob rau hauv cov qhua tuaj yeem kuaj cov kab, cov bishen daws tau ua tiav:
Ua kom zoo nce ntxiv los ntawm 2.8 zaug, thiab lub sijhawm ua haujlwm ntawm ib daim tau compressed rau 2.8 teev
Tus lej chipping ntawm lub qhov tau txo los ntawm 35% rau 0. 5% lossis tsawg dua
Sab hauv lub voj voog ncig yog stably tswj tau ntawm 0. 003-0. 005mm
Qhov saum npoo roughness ra tsawg dua los yog sib npaug rau {{0μm, uas yog qhov zoo dua li kev ua cov khoom siv txawv teb chaws
Qhov kev sib tsoo no tau nce ntau tus nqi tsim nyog ntawm cov neeg siv khoom lag luam Polysilicon Gate Rings los ntawm 61% rau 98.7%, ua tiav hloov cov feem.
TxogNpis Xus
Npis XusTau muaj kev koom tes nrog kev tsim kho kom zoo dua li kaum xyoo, tsom rau kev daws teeb meem "caj dab caj dab" cov teeb meem caj dab Lub tuam txhab 7,500 square metres ntawm cov Hoobkas siv ntse yog nruab nrog cov kev ua thev naus laus zis xws li kev siv tshuab ultrasonic thiab tsib-axis txuas. Nws tau muab cov kev ntsuas tseem ceeb ua cov kev daws teeb meem rau ntau tshaj 20 nyeg semiconduct cov khoom siv manufacturers. Cov thev naus laus zis muaj feem xyuam dhau ISO9001 thiab cov cuab yeej ua haujlwm tshwj xeeb, thiab txuas ntxiv pab cov txheej txheem ntawm kev tsim khoom siab tsim kev ywj pheej.
