Kev Kawm Kev Kawm: Kev tawg hauv Quartz Iav Substrate Ua
Ua Khoom Siv: Quartz iav substrate rau photolithography
Cov lus qhia tshwj xeeb:
Khoom: 99.99% high - purity quarty quarty quarty quarity quarty quintz iav
Cov Nta: Ob npaug {- sided c0.2 Chamfer + Ntsug sab phab ntsa
Cov Yam Yuav Tsum Tau: Ra <150nm (Daim iav Qib)
Qho loj: 145 × 185 × 5.01mm
Kev tsom xam ntawm kev lag luam ua cov ntsiab lus hnov mob
Raws li cov tub ntxhais tseem ceeb ntawm semiconductor cov khoom siv tsim khoom, quartz feem yuav tsum tau ua raws li peb tus qauv nruj me ntsis ± 10μm, thiab sab ntsa loog Roughnness Ra <150nm. Kev ua yeeb yam ib txwm muaj siv cov kev sib tsoo log sib tsoo txheej txheem, uas muaj ob qho teeb meem kev lag luam loj:
Efficion bottuleneck: ib qho {- teev siv li 120 feeb
Nto qhov tsis xws luag: residual grinding wheel pattern leads to Ra value>560ndm
Tuam Kev Poob: Cov cuab yeej siv lub neej muaj tsawg dua 50 daim
Npis XusSolutions Tshuab Innovation
Hauv kev pom ntawm lub zog thiab brittle cov yam ntxwv ntawm Quartz cov ntaub ntawv, ib qho sib xyawKev dawsyog saws:
• 20kHz precision engraving thiab milling system
• PCD PCD micro micro - Hniav milling cutter (ntug R0.05 hli)
• Axial Fawmeded txiav cov txheej txheem (2μm toj ib txheej)
Kev sib piv ntawm kev ntsuas kev ua tau zoo
Los ntawm cov txheej txheem pov thawj thiab kev sib piv, cov ntsuas tseem ceeb tau ua kom zoo dua:
Kev Lag Luam Kev Lag Luam Nqi
Cov tshuaj no tau ua tiav "bottleneck" ua teeb meem hauv cheeb tsam ntawm lub zos lub zos lub zos lub zos ntau lawm rau 50 daim, thiab cov kev tsim nyog ua tus tsim nyog los ntawm 63% rau 98.5%. Raws li kev kuaj pom ntawm Zeit Laser Laser, kev ua cov nplaim taws qhov tseeb PV tus nqi yog<λ 10="" (λ="632.8nm)," which="" meets="" the="" qualified="" assembly="" standards="" of="" optical="">
TxogNpis Xus
Npis Xus PrecisionTshwj xeeb hauv precision kho vajtse feem ua, nrog 7,500 square metres ntawm cov qauv ua haujlwm, thiab cov kev pab cuam them rau ib lub tsev neeg kho mob, cov neeg siv hluav taws xob, kev lag luam cov neeg hlau thiab lwm thaj teb. Nrog rau kev muaj peev xwm ua cov txheej txheem nyuaj thiab iso system ntawv pov thawj, nws muab cov neeg siv khoom nrog kev tsim qauv thiab kev loj hlob rau huab hwm coj ntau lawm.
